Sputtered (Fe,Mn)₃O₄ Spinel Oxide Thin Films for Micro-Supercapacitor

The scaling up of wireless operating microelectronics for upcoming Internet Things (IoT) applications demands high-performance micro-supercapacitors (MSCs) with corresponding high-energy and power capabilities. Indeed, this necessitates the quest MSC’s electrode materials capable delivering high energy density at charge/discharge rates. Many multicationic oxides, such as spinel manganese-iron compounds, demonstrate good pseudocapacitive properties positive electrodes in conventional supercapacitors. However, fulfilling required fabrication techniques is a challenge their MSCs. Hence, study, first time, demonstrates successful deposition Mn-Fe thin films on functional platinum-based current collector. achieved reactive oxygen environment via DC magnetron sputtering subsequently annealed ex situ 600 °C nitrogen environment. electrochemical signature neutral 1 M Na 2 SO 4 aqueous electrolyte comparable to those reported type bulk counterparts. areal capacitance 10 mV.s −1 15.5 mF.cm −2 μ m thick film, exhibiting excellent coulombic efficiency (close 100%) long-term cycle stability after 10,000 cycles. Thus, synthesis oxides compatible microelectronic methods has set prospective path achieve very MSCs future IoT applications.